Method for writing a planar waveguide having gratings of different center wavelengths

ABSTRACT

Multiple Bragg gratings are fabricated in a single planar lightwave circuit platform. The gratings have nominally identical grating spacing but different center wavelengths, which are produced using controlled photolithographic processes and/or controlled doping to control the effective refractive index of the gratings. The gratings may be spaced closer together than the height of the UV light pattern used to write the gratings.

FIELD OF THE INVENTION

The present invention relates to waveguide gratings and moreparticularly to a method for writing waveguide gratings having differentcenter wavelengths.

BACKGROUND INFORMATION

An optical telecommunication system transmits information from one placeto another by way of a carrier whose frequency is in the visible ornear-infrared region of the electromagnetic spectrum. Such a carrier issometimes referred to as an optical signal, an optical carrier, or alightwave signal. Optical fibers transport the lightwave signal, each ofwhich includes several channels. A channel is a specified frequency bandof an electromagnetic signal, and is sometimes referred to as awavelength. Multiple channels are commonly transmitted over the sameoptical fiber to take advantage of the unprecedented capacity offered byoptical fibers. Essentially, each channel has its own wavelength, andall wavelengths are separated enough to prevent overlap. Typically,hundreds or thousands of channels are interleaved by a multiplexer,launched into the optical fiber, and separated by a demultiplexer at areceiver. Along the way, channels may be added or dropped using add/dropmultiplexers (ADM) or switched using optical cross-connects (OXC).

Wavelength division multiplexing (WDM) facilitates propagation ofmultiple channels in a single optical fiber. Wavelength divisiondemultiplexing elements separate the individual wavelengths usingfrequency-selective components such as optical gratings, which canprovide high reflectivity and high wavelength selectivity with the aimof increasing the transmission capacity of optical fibers. One suchoptical grating is a Bragg grating (e.g. in fiber or in planarwaveguides), which selectively transmits or reflects specificwavelengths of light propagating within the optical fiber.

A Bragg grating is a portion of an optical fiber or planar waveguidethat has a refractive index profile, which varies periodically along thelength of the optical fiber. The center wavelength profile of a Bragggrating is determined by the following equation:λ=2nΛ  (Equation 1)where λ is the center (or Bragg) wavelength, n is the mean effectiverefractive index, and Λ is the period of the grating (or gratingspacing).

Simple periodic fiber Bragg gratings are known in the art and manydifferent methods have been described for fabricating fiber Bragggratings. One characteristic of fiber Bragg gratings is that, asEquation 1 indicates, to change the center wavelength profile, one canchange the refractive index or the grating spacing. Prior art techniquesfocus on changing the grating spacing, which is accomplished by changingthe interference pattern used to define the grating profile. Theinterference pattern is changed by changing the inter beam angle betweentwo overlapping interfering ultraviolet (UV) light beams used to exposethe optical fiber or by changing a phase mask through which UV light isshined.

Changing the phase mask or the inter beam angle tends to be expensive,cumbersome, and labor intensive, however, especially when trying tofabricate several different types of fiber Bragg gratings for the myriadfiltering and other applications in optical communication systems. Forexample, to fabricate fiber Bragg gratings with different centerwavelength profiles the writing apparatus is set to differentwavelengths, currently by replacing the phase masks. To write long fiberBragg gratings the optical fiber is translated on long-travel stages toexpose new portions of the photosensitive optical fiber to UV light.Similarly, to write chirped broadband fiber-based gratings chirped masksare generally used and new phase masks are used for each new chirpprofile. Additionally, writing individual Bragg gratings into separateoptical fibers commonly requires time consuming multiple exposures andextensive handling of optical fibers to control the optical fibers.

BRIEF DESCRIPTION OF THE DRAWINGS

In the drawings, like reference numbers generally indicate identical,functionally similar, and/or structurally equivalent elements. Thedrawing in which an element first appears is indicated by the leftmostdigit(s) in the reference number.

FIG. 1 is a schematic diagram of a photonic device according to anembodiment of the present invention.

FIG. 2 is a flowchart illustrating an approach to fabricating thephotonic device in FIG. 1 according to embodiments of the presentinvention.

FIG. 3 is a schematic diagram of a photonic device according to analternative embodiment of the present invention.

FIG. 4 is a graph illustrating an approach to fabricating the photonicdevice in FIG. 3 according to embodiments of the present invention.

FIG. 5 is a schematic diagram of a photonic device according to anotherembodiment of the present invention.

FIG. 6 is a flowchart illustrating an approach to fabricating thephotonic device in FIG. 5 according to embodiments of the presentinvention.

FIG. 7 is a schematic diagram of a photonic device according to anembodiment of the present invention.

FIG. 8 is a flowchart illustrating a process for making the photonicdevice illustrated in FIG. 7 according to embodiments of the presentinvention.

FIG. 9 is a high-level block diagram of a system for making photonicdevices according to embodiments of the present invention.

DETAILED DESCRIPTION OF THE ILLUSTRATED EMBODIMENTS

Embodiments of the present invention are directed to fabrication ofwaveguide gratings. In the following description, numerous specificdetails, such as particular processes, materials, devices, and so forth,are presented to provide a thorough understanding of embodiments of theinvention. One skilled in the relevant art will recognize, however, thatthe embodiments of the present invention can be practiced without one ormore of the specific details, or with other methods, components, etc. Inother instances, well-known structures or operations are not shown ordescribed in detail to avoid obscuring the understanding of thisdescription.

Some parts of this description will be presented using terms such aswavelength, silicon, taper, grating, chirp, and so forth. These termsare commonly employed by those skilled in the art to convey thesubstance of their work to others skilled in the art.

Various operations will be described as multiple discrete blocksperformed in turn in a manner that is most helpful in understandingembodiments of the invention. However, the order in which they aredescribed should not be construed to imply that these operations arenecessarily order dependent or that the operations be performed in theorder in which the blocks are presented.

Reference throughout this specification to “one embodiment” or “anembodiment” means that a particular feature, structure, process, block,or characteristic described in connection with the embodiment isincluded in at least one embodiment of the present invention. Thus, theappearances of the phrases “in one embodiment” or “in an embodiment” invarious places throughout this specification are not necessarily allreferring to the same embodiment. Furthermore, the particular features,structures, or characteristics may be combined in any suitable manner inone or more embodiments.

FIG. 1 is a schematic diagram of a photonic device 100 according to anembodiment of the present invention. The photonic device 100 includes asingle waveguide 102 formed in or on a planar lightwave circuit (PLC)platform 104. The waveguide 102 includes several cascaded gratings 106,108, and 110.

The waveguide 102 may have a circular pattern (as depicted in FIG. 1) orother layout. The waveguide 102 may be a single mode waveguide.Alternatively, the waveguide 102 may be a multimode waveguide.

The PLC platform 104 may be any suitable PLC platform manufactured usingappropriate semiconductor processing equipment. For example, theplatform 102 may be a silica-on-silicon platform, a lithium niobate(LiNbO₃) platform, a gallium arsenide (GaAs) platform, an indiumphosphide (InP) platform, a silicon-on-insulator (SOI) platform, asilicon oxynitride (SiON) platform, a polymer platform, or othersuitable planar lightwave circuit (PLC) platform.

The gratings 106, 108, and 110 may be Bragg gratings whose gratingspacing (Λ) are nominally identical but whose center wavelength aredifferent because each grating 106, 108, and 110 is doped with adifferent concentration and/or type of dopant to give the gratingregions of the waveguides 106, 108, and 110 different effectiverefractive indices after being written. The grating regions of thewaveguides are the locations where gratings will be written. The dopantmay be any suitable photosensitive material, such boron (B), germanium(Ge), and/or phosphorous (P). The refractive index of such a dopedregion will change depending on the UV “dosage”. Thus, if the UV lighthas a periodically varying intensity pattern (as is the case whenwriting a grating), after UV exposure the doped region will have aperiodically varying refractive index, thereby forming a grating.

In another embodiment, the refractive indices may be modulated locallythrough hydrogenating the sample and pre-exposing selected sections withUV light. After hydrogen out-gassing, these sections remainphotosensitive. The UV dosage controls the average refractive index aswell as the induced photosensitivity. On example of hydrogenating isdescribed in more detail below in conjunction with FIG. 3.

The gratings 106, 108, and 110 may be close together (e.g., spacing 120can be less than the height of the UV light intensity pattern used towrite the gratings 106, 108, and 110). By arranging the gratings closelytogether, the gratings may be written in one exposure in someembodiments.

One or more of the gratings 106, 108, and 110 may be longer than thelength of the UV light beam used to write the gratings. In oneembodiment of the present invention, the UV light beam is one centimeterlong and the grating 106 is two centimeters long. In other embodiments,the dimensions of the UV light beam and/or the gratings may bedifferent.

FIG. 2 is a flowchart illustrating a process 200 for making the photonicdevice 100 (FIG. 1) according to embodiments of the present invention. Amachine-readable medium with machine-readable instructions thereon maybe used to cause a processor to perform the process 200. Of course, theprocess 200 is only an example process and other processes may be used.The order in the process 200 are described should not be construed toimply that these operations are necessarily order-dependent or that theoperations be performed in the order in which the blocks are presented.

Referring to FIGS. 1 and 2, an operation 202 is performed to fabricatethe waveguide 102 in or on a PLC platform using standard semiconductorfabrication techniques. These fabrication techniques can includeimplantation, doping, evaporation, physical vapor deposition, ionassisted deposition, photolithography, magnetron sputtering, electronbeam sputtering, masking, reactive ion etching, and/or othersemiconductor fabrication techniques well known to those of ordinaryskill in the art. For example, in one embodiment, the waveguide 102 hasa core formed from oxide such as silica.

Still referring to FIGS. 1 and 2, an operation 204 is performed to dopeselected regions of the waveguide 102 that will serve as the gratings.For example, a temporary mask layer can be formed on the waveguides,which is then patterned to define the grating regions in the waveguides.This process can be performed before the top cladding layer isdeposited. In some embodiments, this process can be performed after thetop cladding layer is formed so that the top cladding layer can be dopedinstead of the core layer. In this alternative embodiment, theevanescent field of the propagating light can be affected by a gratingwritten in cladding layer. Alternatively, the cladding can be patternedand etched to define the grating regions, with the cladding layer itselfserving as a mask for the doping process. The grating regions are thenselectively doped (described below).

The grating regions are selectively doped with a predeterminedconcentration or a predetermined composition of one or morephotosensitive materials. In some embodiments, the dopants include boron(B), germanium (Ge), and/or phosphorous (Ph). The grating regions can bedoped using any suitable doping processes such as, for example, ionimplantation, diffusion from spin-on solutions, or other current orfuture techniques.

In one embodiment, the region of waveguide 102 corresponding to thegrating 106 is doped with a first predetermined concentration ofgermanium, which gives the grating 106 a first refractive index and afirst center wavelength. Similarly, the region of waveguide 102 regioncorresponding to the grating 108 is doped with a second predeterminedconcentration of germanium, which gives the grating 108 a secondrefractive index and a second center wavelength. Likewise, the region ofwaveguide 102 corresponding to the grating 110 is doped with a thirdpredetermined concentration of germanium, which gives the grating 110 athird refractive index and a third center wavelength. In one embodimentof the present invention, dopant concentrations may vary the refractiveindex of the waveguide regions for the gratings 106, 108, and 110 byapproximately 0.2 percent to shift the center wavelength by 0.2 percentor 30 nm at 1550 nm. Gratings can then be written in doped regions ofwaveguide 102 (FIG. 1) as described below.

Again referring to FIGS. 1 and 2, an operation 206 is performed toexpose one or more of the doped regions of waveguide 102 (correspondingto the gratings 106, 108, and/or 110) to an UV light intensity patternin a direction transverse to the waveguide 102. This UV light intensitypattern determines the grating spacing for the gratings 106, 108, and110. In one embodiment, the exposure writes all gratings simultaneouslyso that the gratings 106, 108 and 110 all have the substantially thesame grating spacing. In other embodiments, each of the gratings may bewritten individually, or any subset of the gratings may be writtensimultaneously.

In one embodiment, a suitable KrF excimer laser/phase mask unit is usedto expose the doped regions of waveguide 102 (FIG. 1) corresponding tothe gratings 106, 108, and 110 to a selected UV light intensity pattern.Because the regions were doped differently from each other, theresulting waveguide gratings will generally have different centerwavelengths even though the grating spacing is substantially identical.In one embodiment, the grating 106 has a center wavelength of 1555 nm,the grating 108 has a center wavelength of 1520 nm, and grating 110 hasa center wavelength of 1560 nm.

For example, a KrF excimer laser/phase mask unit can be configured tooutput the UV light intensity pattern with a height of 300 microns. Inone embodiment, the regions of waveguide 102 for the gratings 106, 108,and 110 are arranged so that the total area occupied by the dopedregions for gratings 106, 108 and 110 has a height that is less than 300microns. The resulting photonic device is more compact and allowsportions of all three gratings to be written simultaneously in a singleexposure. Additionally, no wide-bandwidth tuning of the individualexposure (interbeam angle) is needed to tune the waveguide gratings to acenter wavelength.

In an embodiment of the present invention in which one or more ofgratings is to be longer than the length of an UV light beam used toexpose the gratings, the region of the waveguide for the grating may befolded such that the entire grating can be written in the same exposure.For example, in embodiments in which the UV light beam is onecentimeter, the grating may be two centimeters long but be folded intoone-centimeter (or less) portions. In this case, the resulting gratinghas gaps (i.e. sections of waveguide where there is no grating written)between the grating segments. Such devices are known as sampled orsegmented Bragg gratings.

The photonic device 100 may be implemented as a waveguide filter tocompensate for chromatic dispersion. Chromatic dispersion is thetemporal separation of the constituent colors of a lightwave pulse andcan be problematic because it causes channel amplitudes to vary andcauses adjacent data bits or pulses to bleed into each other, causinginter-symbol interference (ISI). In an optical fiber, dispersion occursbecause different wavelengths propagate at different speeds.Compensation for dispersion in optical fiber networks becomesincreasingly important as bit rates increase because the bits (opticalpulses) are now spaced closer together and the shorter pulses contain alarger span of bandwidth.

The photonic device 100, when operating, receives a multiplexedlightwave signal, which enters the waveguide 102 and is incident on thegratings 106, 108, and 110. The multiplexed lightwave signal has severalsingle channel lightwave signals each with its own center wavelengthprofile. According to embodiments of the present invention, the grating106 reflects a first wavelength (e.g., 1535 nm) and passes otherwavelengths, the grating 108 reflects second wavelength (e.g., 1550 nm)and passes other wavelengths, and the grating 110 reflects a thirdwavelength (e.g., 1565 nm) and passes other wavelengths. In anotherembodiment, each grating has a chirped grating spacing, which serves tocompensate for dispersion experienced by the data stream propagating onthat wavelength.

FIG. 3 is a schematic diagram of a photonic device 300 according to anembodiment of the present invention. The photonic device 300 includesseveral waveguides 302, 304, 306, and 308 formed in or on a PLC platform310. The wave-guides 302, 304, 306, and 308 include a grating 312, 314,316, and 318, respectively. The platform 310 is similar to the platform104. The waveguides 302, 304, 306, and 308 may be similar to thewaveguide 102.

The gratings 312, 314, 316, and 318 may be Bragg gratings whose gratingspacings are nominally identical but whose center wavelengths aredifferent because each grating 312, 314, 316, and 318 has a differentgeometry (e.g., width, depth, height) to give these grating regionsdifferent effective refractive indices. In one embodiment of the presentinvention, the grating 312 may be seven microns wide, the grating 314may be six microns wide, the grating 316 may be five microns wide, andthe grating 318 may be four microns wide.

In one embodiment of the present invention, one or more sections of thewaveguides 302, 304, 306, and 308 are loaded with hydrogen (mentionedabove as hydrogenating). Such hydrogen loading improves thephotosensitivity of the waveguide by orders of magnitude and changes theeffective refractive indices of the one or more of the loaded sectionsof waveguides 302, 304, 306, and/or 308. For example, hydrogen may beselectively implanted in the regions of the waveguides 302, 304, 306,and 308 corresponding to the gratings 312, 314, 316, and 318. Thehydrogen can be implanted through ion implantation or localized brushingwith a hydrogen flame. The hydrogen loading will increase thephotosensitivity locally and allow for the generation of differentrefractive indices for similar levels of UV exposure. In thisembodiment, the wavelength strength (reflectivity) and center-wavelengthare directly coupled during UV writing of the Bragg gratings.

In other embodiments of the present invention, one or more sections ofthe waveguides 302, 304, 306, and 308 are selectively pre-exposed orpost-exposed to different levels of uniform UV radiation. This serves tochange the average refractive index of individual waveguides and shiftthe center-wavelengths of the gratings 312, 314, 316, and 318.

FIG. 4 is a graphical representation 400 illustrating the relationshipbetween the width of a waveguide and the center wavelength of a Bragggrating written in the waveguide according to an embodiment of thepresent invention. The graphical representation 400 includes an “x” axis402, which represents waveguide width in micrometers (μm), and a “y”axis 404, which represents wavelength in nanometers (nm). The graphicalrepresentation 400 includes a curve 406, which represents the change incenter wavelength of a Bragg grating written in the waveguide as thewidth of the waveguide changes. Note that in FIG. 4, as the width of thewaveguide increases, the center wavelength also increases.

In another embodiment, the gratings 312, 314, 316, and 318 may be Bragggratings whose grating spacings are nominally identical but whose centerwavelengths are different because the core of one or more of thewaveguides 302, 304, 306, and/or 308 in the grating regions has a beendoped so that the grating regions have different effective refractiveindices. FIG. 5 is a graphical representation 500 illustrating therelationship between the refractive index of a waveguide core and thecenter wavelength of a Bragg grating written in the waveguide accordingto an embodiment of the present invention.

The graphical representation 500 includes an “x” axis 502, whichrepresents core index of refraction, and a “y” axis 504, whichrepresents wavelength in nanometers. The graphical representation 500includes a curve 506, which represents the change in center wavelengthof a Bragg grating written in the waveguide as the index of refractionof the waveguide changes. Note that in FIG. 5, as the refractive indexof the waveguide increases, the center wavelength also increases. In oneembodiment, the cores may be doped with different concentrations ofdopants according to embodiments of the present invention to vary therefractive index of gratings written in the waveguides. In anotherembodiment, the cores may be doped with different dopant compositions(e.g., aluminum, boron, phosphorous) according to embodiments of thepresent invention to vary the refractive index of gratings written inthe waveguides.

In still another embodiment, the gratings 312, 314, 316, and 318 may beBragg gratings whose grating spacing are nominally identical but whosecenter wavelengths are different because the cladding of the waveguides302, 304, 306, and/or 308 in the grating regions have differenteffective refractive indices. For example, layers of SiO may be grown ona Si substrate using plasma enhanced chemical vapor deposition (PECVD)techniques. The Si substrate may be nominally fifteen microns thick. Alower cladding layer may be deposited on the Si substrate under thelayers of SiO. A core layer may be formed using the SiO doped withgermanium and/or boron, which may increase the refractive index of theSiO. The core layer may be six microns thick. Portions of the core layermay be wet-etched to leave a pattern for the waveguides 302, 304, 306,and/or 308. Germanium, boron, or other suitable dopants may be doped inthe core layer of the waveguides 302, 304, 306, and/or 308 in thegrating regions for each grating 312, 314, 316, and 318 using ionimplantation, for example. An upper cladding layer may be deposited onthe core layer. The upper cladding layer may doped with phosphorousand/or boron. The upper cladding layer may have a thickness of aroundfifteen to twenty microns. The refractive index of the upper claddinglayer is similar to the refractive index of lower cladding layer.

FIG. 6 is a flowchart illustrating a process 600 for making the photonicdevice 300 according to embodiments of the present invention. Amachine-readable medium with machine-readable instructions thereon maybe used to cause a processor to perform the process 600. Of course, theprocess 600 is only an example process and other processes may be used.The order in which the blocks are described should not be construed toimply that these operations are necessarily order-dependent or that theoperations be performed in the order in which the blocks are presented.

An operation 602 is performed to fabricate waveguides of differentwidths in or on a PLC platform using standard semiconductor fabricationtechniques. As previously described, these techniques include ionimplantation, diffusion doping, evaporation, physical vapor deposition,ion assisted deposition, photolithography, magnetron sputtering,electron beam sputtering, masking, reactive ion etching, and/or othersemiconductor fabrication techniques well known to those skilled in theart. In one embodiment of the present invention, the widths of thewaveguide regions corresponding to the gratings 312, 314, 316 and 318are seven microns, six microns, five microns, and four microns,respectively.

An operation 604 is performed to expose the waveguide regionscorresponding to the gratings 312, 314, 316, and/or 318, respectively,to a selected UV light intensity pattern. In this embodiment, the UVlight intensity pattern is provided in a direction transverse to thelongitudinal axes of waveguides 302, 304, 306, and/or 308. This exposurewrites the grating with the desired grating spacing in the regions ofwaveguide 302, 304, 306, and/or 308 for the gratings 312, 314, 316,and/or 318. As previously described, a suitable KrF excimer laser can beused to expose the doped waveguide 302, 304, 306, and 308 regions to theUV light intensity pattern. The UV light intensity pattern may have aheight of 300 microns. In one embodiment, the area occupied by thesewaveguide regions has a width (or height) that is less than 300 microns.Thus, the exposure may write all gratings simultaneously, any one of thegratings individually, or any subset of the gratings simultaneously.

Devices implemented according to embodiments of the present inventionmay be more compact, simpler to fabricate, and less expensive. Forexample, in one embodiment, the photonic device 300 may be implementedas a multiple wavelength division multiplexing (WDM) filter in which oneor more of the gratings 312, 314, 316, and 318 is separatelyaddressable. For example, the device 300 may be a forty-channel cascadedseries of channel dispersion compensating waveguide gratings havingtwenty-five gigahertz (GHz) spacing. The device 300 thus may be sixcentimeters long and two centimeters wide. In embodiments in whichdevices are implemented as chirped waveguide gratings, a controlledtapering of the refractive index may greatly improve “group delayripple” that can plague gratings produced by the standard chirpedphase-mask approach.

FIG. 7 is a schematic diagram of a photonic device 700 according to anembodiment of the present invention. The photonic device 700 includesseveral waveguides 702, 704, 706, 708, and 710 formed in or on a PLCplatform 750. Each waveguide 702, 704, 706, 708, and 710 includes agrating 712, 714, 716, 718, and 720. The waveguides 702, 704, 706, 708,and 710 are similar to the waveguides 302, 304, 306, and 308. Theplatform 750 is similar to the platform 104.

The gratings 712, 714, 716, 718, and 720 are similar to the gratings106, 108, and 110 in that the gratings 712, 714, 716, 718, and 720 maybe Bragg gratings whose grating spacing are nominally identical. Thegratings 712, 714, 716, 718, and 720 are similar to the gratings 312,314, 316, and 318 in that the center wavelengths are different becauseeach grating 312, 314, 316, and 318 has a different width to give thegrating regions of the waveguides 312, 314, 316, and 318 differentrefractive indices. The gratings 712, 714, 716, 718, and 720 aredifferent from the gratings 312, 314, 316, and 318 in that the width ofone or more of the gratings 712, 714, 716, 718 and/or 720 is tapered asshown with respect to the grating 720. As is well known, tapering givesthe grating a “chirp” (i.e., a subset of non-uniform refractive indicesalong the length of the grating). The chirp may vary symmetrically,asymmetrically, either increasing or decreasing. Alternatively, thechirp may be linear (e.g., the refractive index varies linearly with thelength of the grating). The chirp may be quadratic, random, or discrete.

In one embodiment of the present invention, the width of the grating 720at points 730, 732, 734 and 736 may be seven microns, six microns, fivemicrons, and four microns, respectively. After reading the descriptionherein, persons of ordinary skill in the relevant art(s) will readilyrecognize how to implement various chirps.

FIG. 8 is a flowchart illustrating a process 800 for making the photonicdevice 700 according to embodiments of the present invention. Amachine-readable medium with machine-readable instructions thereon maybe used to cause a processor to perform the process 800. Of course, theprocess 800 is only an example process and other processes may be used.The order in which the blocks are described should not be construed toimply that these operations are necessarily order-dependent or that theoperations be performed in the order in which the blocks are presented.

An operation 802 is performed to fabricate waveguides of tapered widthsin or on a PLC platform using standard semiconductor fabricationtechniques, such as implantation, doping, evaporation, physical vapordeposition, ion assisted deposition, photolithography, magnetronsputtering, electron beam sputtering, masking, reactive ion etching,and/or other semiconductor fabrication techniques well known to thoseskilled in the art. In one embodiment of the present invention, thewaveguide 702 may be tapered adiabatically. For example, the width orheight of the waveguide 702 at the points 730, 732, 734 and 736 may beseven microns, six microns, five microns and four microns, respectively.Of course, other shapes or dimensions are possible in other embodiments.

An operation 804 is performed to expose the waveguide regionscorresponding to the gratings 712, 714, 716, and/or 718 to a selected UVlight intensity pattern in a direction transverse to the waveguides 702,704, 706, 708 and 710. The intensity pattern is generated to write thegrating in the regions of waveguides 702, 704, 706, 708, and 710 for thegratings 712, 714, 716, and/or 718, respectively, with the desiredgating spacing. The exposure may write all gratings simultaneously, anyone of the gratings individually, or any subset of the gratingssimultaneously. In one embodiment, a suitable KrF excimer laser is usedto generate the UV light intensity pattern. The UV light intensitypattern may have a height of 500 microns. In one embodiment, thewaveguide regions corresponding to the gratings 712, 714, 716, and/or718 are closer to each other than 500 microns.

FIG. 9 is a block diagram of a WDM system 900 using photonic devicesaccording to embodiments of the present invention. The WDM system 900includes a planar lightwave circuit (PLC) 902 having a waveguide 904formed therein or thereon and gratings 910, 912, and 914 in or on thewaveguides 904. These gratings are formed as described above. The system900 also includes an optical signal source 920 that provides an opticalsignal to be received by PLC 902. The gratings 910, 912 and 914 providedispersion compensation across the multiple optical channels of the WDMsystem. After passing through the cascaded gratings 910, 912, and 914,the optical signal can be propagated to other optical circuitry (notshown). In another embodiment (not shown), PLC 902 may include similargratings formed in or on separately addressable waveguides to be used asWDM filters.

Embodiments of the invention can be implemented using hardware,software, or a combination of hardware and software. In implementationsusing software, the software may be stored on a computer program product(such as an optical disk, a magnetic disk, a floppy disk, etc.) or aprogram storage device (such as an optical disk drive, a magnetic diskdrive, a floppy disk drive, etc.).

The above description of illustrated embodiments of the invention is notintended to be exhaustive or to limit embodiments of the invention tothe precise forms disclosed. While specific embodiments of, and examplesfor, the invention are described herein for illustrative purposes,various equivalent modifications are possible, as those skilled in therelevant art will recognize. These modifications can be made toembodiments of the invention in light of the above detailed description.

The terms used in the following claims should not be construed to limitthe invention to the specific embodiments disclosed in the specificationand the claims. Rather, the scope of embodiments of the invention is tobe determined entirely by the following claims, which are to beconstrued in accordance with established doctrines of claiminterpretation.

1. A method of creating multiple gratings in or on a single planarlightwave circuit (PLC), comprising: forming a set of regions havingdifferent effective refractive indices in a waveguide; exposing the setof regions to an ultraviolet (UV) intensity pattern to form a set ofgratings, wherein the set of gratings have substantially identicalgrating spacing and different center wavelengths; and wherein formingthe set of regions comprises doping the set of different regions so thateach region of the set of regions has a doping parameter that isdifferent from that of the other regions of the set of regions.
 2. Themethod of claim 1, wherein the set of regions is exposed simultaneously.3. The method of claim 1, wherein the set of regions has substantiallyidentical width profiles.
 4. The method of claim 3, wherein the set ofregions have width profiles that vary along a longitudinal axis of thewaveguide.
 5. The method of claim 1, wherein one region of the set ofregions is doped with a selected dopant at a first concentration andanother region of the set of regions is doped with the selected dopantat a second concentration different from the first concentration.
 6. Themethod of claim 1, wherein after doping, one region of the set ofregions includes a dopant that is not included in another region of theset of regions.
 7. The method of claim 1, wherein a core layer of aregion of the set of regions is doped.
 8. The method of claim 1, whereina cladding layer of a region of the set of regions is doped.
 9. Themethod of claim 1, wherein forming the set of regions comprises forminga first region of the set of regions with a geometry that is differentfrom that of a second region of the set of regions.
 10. The method ofclaim 9, wherein the first region has a depth that is different fromthat of the second region.
 11. The method of claim 9, wherein the firstregion has a width that is different from that of the second region. 12.The method of claim 1, wherein the set of gratings are chirped.
 13. Themethod of claim 1, wherein the waveguide is arranged in a pattern sothat regions of the set of regions are proximate to each other.
 14. Themethod of claim 1, wherein forming the set of regions includeshydrogenating selected sections of the set of regions.
 15. The method ofclaim 14, further comprising pre-exposing the selected sections withlight before hydrogenating the selected sections.
 16. The method ofclaim 14, wherein ion implantation is used to hydrogenate the selectedsections.
 17. A product formed by the process of claim 1.